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Feature1

We have been developing various types of laboratory equipment since the 1960s. As a leading manufacturer, we take pride in our track record of delivering more than 7000 units to our customers.

◆Delivery Record
  As a leading manufacturer of laboratory spin coaters and mask aligners, Photolithography.com (Mikasa) has delivered more than 7000 units to its customers.
 
◆ International Delivery Record
  China, Taiwan, South Korea, Singapore, Malaysia, India, Thailand, U.S.A., and Australia
 

◆Previous Spin Coaters

Previous Spin Coaters Year

◆Previous Mask Aligners

Previous Mask Aligners
Feature2

We offer laboratory semiconductor manufacturing equipment used in the photolithography process, including coating, exposure, development, and etching, on a one-stop basis.

Resist Coating ..images Exposure ..images Development ..images Etching

We offer all equipment required for the front-end stages of semiconductor manufacturing, including resist coating, exposure, development, and etching, on a one-stop basis. In addition.

Feature3

We have verification data on various coating materials to support your research.

(Coating) ●We have verification data (coating thickness distribution) on various coating materials.
  ●I have held a variety of test data.
 ・Thick coatings up to 100 μm thick can be formed.
 ・Coating thickness uniformity and more
<Coating Thickness Distribution Data>
Coater MS-B200
Coating thickness measurement system F50 (from Filmetrics)
Resist OFPR-800LB (from Tokyo Ohka Kogyo Co., Ltd.)
Substrate size 8-inch-dia. silicon wafers
Target coating thickness 1μm
Coating thickness distribution ±0.5%
  <Coating Thickness Distribution Data>
Coater MS-B200 (Shield type)
Coating thickness measurement system F50 (from Filmetrics)
Resist OFPR-800LB (from Tokyo Ohka Kogyo Co., Ltd.)
Substrate size 65×65mm
Coating thickness distribution ±0.7%
Coating Thickness Distribution Data   Coating Thickness Distribution Data

(Exposure)●We have a large database of verification data (resist patterns).

SEM image (thin coating)
Mask aligner MA-20
Line width 1μm (L&S)
Resist OFPR-800LB (from Tokyo Ohka Kogyo Co., Ltd.)
Coating thickness 1μm
  SEM image (thick coating)
Mask aligner MA-20
Line width 8μm (rectangular holes)
Resist e-PR THICK (from eChem Solutions Japan Inc.)
Coating thickness 6.3μm
  SU-8
Mask aligner MA-20
Line width 7μm(cylinders)
Resist SU-8 (from Nippon Kayaku Co., Ltd.)
Coating thickness 30μm
Feature4

Our quality repair and maintenance services are available to support customers.

◆Service networks in and outside Japan
 ・Two service locations in Japan
  Tokyo:2-8-1, Shibakoen, Minato-ku, Tokyo 105-0011, Japan  Phone: +81-3-3433-8216
  Osaka:1-13-35, Higashinakajima, Higashiyodogawa-ku, Osaka 533-0033, Japan  Phone: +81-6-6325-5661
 ・Two service locations outside Japan
  China (Shanghai):Ushio (Shanghai) Inc. (http://www.ushio.com.cn/)
  Taiwan (Taibei):Kawakawa Co., Ltd. (Website: www.kawakawa.com.tw)

◆Repair and maintenance staff
 ・Eight members in Japan
 ・Four members outside Japan

 

◆ Technology and services (alternative units)

Area
Please feel free to contact us!Thank you very much for visiting Photolithography.com. Leave everything to us regarding coaters, mask aligners, and other photolithography equipment.